Leica EM ACE600 coating system

Vacuum Chamber
Touch screen control panel
Rotating sample stage, 24 positions for 12,7 mm SEM stubs (exchangealbe)
Removable shielding, shutter and door
Quartz (QSG) thickness measurements
Carbon thread source and sputter source (Ag and Au)
Automated height and tilt adjustment

Project co-financed by the European Regional Development Fund under the Małopolska Regional Operational Programme for 2007-2013